FCVA 法によるta-C 膜の3 次元成膜および特性評価

Publication Information

Title

Japanese:	FCVA 法によるta-C 膜の3 次元成膜および特性評価
English:	Study on the 3-dimensional coating and the evaluation of ta-C film properties prepared by FCVA method

Author

Japanese:	平田祐樹, 川合功太郎, 加藤豊大, 藤本隼汰, 為野悠人, 石川功, 松岡広成, 赤坂大樹, 大竹尚登.
English:	Yuki Hirata, Kotaro Kawai, Toyohiro Kato, Hayata Fujimoto, Yuto Tameno, Takumi Ishikawa, Hiroshige Matsuoka, Hiroki Akasaka, Naoto Ohtake.

Language

Japanese

Journal/Book name

Japanese:	2022年度精密工学会春季大会学術講演会要綱集
English:	Abst. book: The Japan Society for Precision Engineering Spring Meeting 2022

Volume, Number, Page

Published date

Mar. 15, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	2022年度精密工学会春季大会学術講演会
English:	The Japan Society for Precision Engineering Spring Meeting 2022

Conference site

Japanese:
English: