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Publication Information
Title
Japanese:
FCVA 法によるta-C 膜の3 次元成膜および特性評価
English:
Study on the 3-dimensional coating and the evaluation of ta-C film properties prepared by FCVA method
Author
Japanese:
平田 祐樹
,
川合 功太郎
,
加藤 豊大
, 藤本 隼汰, 為野 悠人, 石川 功, 松岡 広成,
赤坂 大樹
,
大竹 尚登
.
English:
Yuki Hirata
,
Kotaro Kawai
,
Toyohiro Kato
, Hayata Fujimoto, Yuto Tameno, Takumi Ishikawa, Hiroshige Matsuoka,
Hiroki Akasaka
,
Naoto Ohtake
.
Language
Japanese
Journal/Book name
Japanese:
2022年度精密工学会春季大会学術講演会要綱集
English:
Abst. book: The Japan Society for Precision Engineering Spring Meeting 2022
Volume, Number, Page
Published date
Mar. 15, 2022
Publisher
Japanese:
English:
Conference name
Japanese:
2022年度精密工学会春季大会学術講演会
English:
The Japan Society for Precision Engineering Spring Meeting 2022
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.