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Publication Information
Title
Japanese:
English:
A 3-D capacitive-detection electrode for a single gold proof-mass three-axis MEMS accelerometer
Author
Japanese:
市川崇志
,
内山晃宏
,
柴田滉平
,
飯田慎一
,
李尚曄
,
石原昇
,
町田克之
,
益一哉
,
伊藤浩之
.
English:
Takasi Ichikawa
,
Akihiro Uchiyama
,
Kohei Shibata
,
Shinichi Iida
,
Sangyeop Lee
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
,
Hiroyuki Ito
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Mar. 2021
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Inertial
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.