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Title
Japanese:3D容量検出電極による単一Au錘3軸MEMS加速度センサの検討 
English: 
Author
Japanese: 大西哲, 内山晃宏, 柴田滉平, 市川崇志, 李尚曄, 飯田慎一, 石原昇, 町田克之, 益一哉, 伊藤浩之.  
English: Akira Onishi, Akihiro Uchiyama, Kohei Shibata, Takasi Itikawa, Sangyeop Lee, Shinichi Iida, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu, Hiroyuki Ito.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 2021 
Publisher
Japanese: 
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Conference name
Japanese:第82回 応用物理学会秋季学術講演会 
English: 
Conference site
Japanese: 
English: 

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