Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討

Publication Information

Title

Japanese:	Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討
English:

Author

Japanese:	柴田滉平, 内山晃宏, 大西哲, 李尚曄, 町田克之, 石原昇, 益一哉, 伊藤浩之.
English:	Kohei Shibata, Akihiro Uchiyama, Akira Onishi, Sangyeop Lee, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu, Hiroyuki Ito.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2021

Publisher

Japanese:
English:

Conference name

Japanese:	第13回集積化MEMSシンポジウム
English:

Conference site

Japanese:
English: