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Publication Information
Title
Japanese:
Au錘1軸差動型CMOS-MEMS加速度センサの統合設計シミュレーションの検討
English:
Author
Japanese:
柴田滉平
,
内山晃宏
,
大西哲
,
李尚曄
,
町田克之
,
石原昇
,
益一哉
,
伊藤浩之
.
English:
Kohei Shibata
,
Akihiro Uchiyama
,
Akira Onishi
,
Sangyeop Lee
,
Katsuyuki Machida
,
Noboru Ishihara
,
Kazuya Masu
,
Hiroyuki Ito
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Nov. 2021
Publisher
Japanese:
English:
Conference name
Japanese:
第13回集積化MEMSシンポジウム
English:
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.