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Title
Japanese: 
English:Effects of Cross-Sectional Geometry in Bending Test of Gold Micro-Cantilever toward Design of Movable MEMS Components 
Author
Japanese: 保里 亮平, 藤田 一矢, 陳 君怡, 栗岡 智行, Chang Tso-Fu Mark, CHAKRABORTY P, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人.  
English: Ryohei Hori, Kazuya Fujita, Chun Yi Chen, Tomoyuki Kurioka, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 14, 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES) 
Conference site
Japanese: 
English: 

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