Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS

Publication Information

Title

Japanese:
English:	Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS

Author

Japanese:	秋山拓海, 陳君怡, 栗岡智行, Chang Tso-Fu Mark, CHAKRABORTY P, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Takumi Akiyama, Chun-Yi Chen, Tomoyuki Kurioka, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 14, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES)

Conference site

Japanese:
English:	Leuven