Home >

news Help

Publication Information


Title
Japanese: 
English:Warpage Characteristics of Gold Proof Mass in MEMS Capacitive Accelerometer 
Author
Japanese: 大村 太郎, 陳 君怡, 栗岡 智行, Chang Tso-Fu Mark, 大西 哲, CHAKRABORTY P, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人.  
English: Taro Omura, Chun-Yi Chen, Tomoyuki Kurioka, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 14, 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES) 
Conference site
Japanese: 
English: 

©2007 Tokyo Institute of Technology All rights reserved.