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Title
Japanese:Pt結晶膜上へのTa2O5圧電薄膜の成膜と評価 
English: 
Author
Japanese: 松浦佳祐, 鈴木雅視, 垣尾省司, 小寺正徳, 舟窪浩.  
English: 松浦佳祐, 鈴木雅視, 垣尾省司, Masanori Kodera, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Jan. 27, 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese:圧電材料・デバイスシンポジウム 
English: 
Conference site
Japanese: 
English: 

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