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Publication Information
Title
Japanese:
SrRuO3/Pt/Si基板上のTa2O5圧電薄膜の成膜と評価
English:
Author
Japanese:
松浦佳祐, 鈴木雅視, 垣尾省司,
小寺正徳
,
舟窪浩
.
English:
松浦佳祐, 鈴木雅視, 垣尾省司,
Masanori Kodera
,
HIROSHI FUNAKUBO
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Mar. 7, 2022
Publisher
Japanese:
English:
Conference name
Japanese:
弾性波素子技術コンソーシアム 第6回総会
English:
Conference site
Japanese:
English:
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Tokyo Institute of Technology All rights reserved.