Evaluation of TMAH treatment for isolation process of N-polar GaN HEMTs

Publication Information

Title

Japanese:
English:	Evaluation of TMAH treatment for isolation process of N-polar GaN HEMTs

Author

Japanese:	後藤高寛, 新井貴大, 青田智也, 宮本恭幸.
English:	T. Gotow, T. Arai, T. Aota, Y. Miyamoto.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 1, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Compound Semiconductor Week

Conference site

Japanese:	アンナーバ
English:	Ann Arbor