A micro chemical analyzing system integrated on a silicon wafer

Publication Information

Title

Japanese:
English:	A micro chemical analyzing system integrated on a silicon wafer

Author

Japanese:	中川茂, 庄子習一, 江刺正喜.
English:	Shigeru Nakagawa, Shuichi Shoji, Masayoshi Esashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Feb. 1990

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE Micro Electro Mechanical Systems

Conference site

Japanese:
English:	Napa Valley, California