Efficient fabrication process for metallic structures of submicrometer size | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Efficient fabrication process for metallic structures of submicrometer size

Author

Japanese:	沈浩, 吉野雅彦.
English:	Hao Shen, MASAHIKO YOSHINO.

Language

English

Journal/Book name

Japanese:	Journal of Micromechanics and Microengineering
English:

Volume, Number, Page

Vol. 30 No. 3

Published date

Feb. 3, 2020

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI

https://doi.org/10.1088/1361-6439/ab6c73

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