Cerium oxide capping on Y-doped HfO2 films for ferroelectric phase stabilization with endurance improvement

Publication Information

Title

Japanese:
English:	Cerium oxide capping on Y-doped HfO2 films for ferroelectric phase stabilization with endurance improvement

Author

Japanese:	水谷一翔, 星井拓也, 若林整, 筒井一生, Edward Y. Chang, 角嶋邦之.
English:	Kazuto Mizutani, Takuya Hoshii, Hitoshi Wakabayashi, Kazuo Tsutsui, Edward Y. Chang, Kuniyuki Kakushima.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics (JJAP)

Volume, Number, Page

Vol. 61 No. 2

Published date

Feb. 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: