Elucidation of PVD MoS2 Film Formation Process and its Structure Focusing on Sub-Monolayer Region

Publication Information

Title

Japanese:
English:	Elucidation of PVD MoS2 Film Formation Process and its Structure Focusing on Sub-Monolayer Region

Author

Japanese:	小野凌, 今井慎也, 草間優太, 濱田拓也, 濱田昌也, 宗田伊理也, 角嶋邦之, 筒井一生, 狩野絵美, 五十嵐信行, 若林整.
English:	Ryo Ono, Shinya Imai, Yuta Kusama, Takuya Hamada, Masaya Hamada, Iriya Muneta, Kuniyuki Kakushima, Kazuo Tsutsui, Emi Kano, Nobuyuki Ikarashi, Hitoshi Wakabayash.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics (JJAP)

Volume, Number, Page

Vol. 61

Published date

Feb. 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: