Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer with Gold Perforated Proof-mass Structure

Author

Language

English

Journal/Book name

Japanese:
English:	IEEE Sensors Journal

Volume, Number, Page

Vol. 22 Issue 15

Published date

June 24, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

https://doi.org/10.1109/JSEN.2022.3184340

DOI

https://doi.org/10.1109/JSEN.2022.3184340

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