Thermal stability of ferroelectric AlScN films

Publication Information

Title

Japanese:
English:	Thermal stability of ferroelectric AlScN films

Author

Japanese:	澁川涼太, TSAI Sung Lin, 星井拓也, H. Wakbayashi, 筒井一生, 角嶋邦之.
English:	R. Shibukawa, S. -L. Tsai, T. Hoshii, H. Wakbayashi, K. Tsutsui, K. Kakushima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Workshop on Dierectric Thin Films for Futre Electron Devices -Science and Technology-

Conference site

Japanese:
English: