Gas-Phase Analysis by FTIR Spectrometry for Plasma with Dilute H2SO4 Solution

Publication Information

Title

Japanese:
English:	Gas-Phase Analysis by FTIR Spectrometry for Plasma with Dilute H2SO4 Solution

Author

Japanese:	Deng SiQi, 竹内希, 稗田純子, 高橋克幸, 立花孝介, O.L. Li.
English:	S. Deng, N. Takeuchi, J. Hieda, K. Takahashi, K. Tachibana, O.L. Li.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 2021

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ICFD 2021

Conference site

Japanese:
English:	Web meeting