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Publication Information
Title
Japanese:
カーボンオニオンにより超精密研磨した単結晶SiC面の加工変質層評価
English:
Author
Japanese:
村井祥祐
,
桃園 聡
,
青野祐子
,
平田 敦
.
English:
Shosuke Murai
,
Satoshi MOMOZONO
,
Yuko Aono
,
ATSUSHI HIRATA
.
Language
Japanese
Journal/Book name
Japanese:
2022年度精密工学会春季大会学術講演会講演論文集
English:
Volume, Number, Page
pp. 729-730
Published date
Mar. 2022
Publisher
Japanese:
English:
Conference name
Japanese:
2022年度精密工学会春季大会学術講演会
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.