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Title
Japanese:カーボンオニオンにより超精密研磨した単結晶SiC面の加工変質層評価 
English: 
Author
Japanese: 村井祥祐, 桃園 聡, 青野祐子, 平田 敦.  
English: Shosuke Murai, Satoshi MOMOZONO, Yuko Aono, ATSUSHI HIRATA.  
Language Japanese 
Journal/Book name
Japanese:2022年度精密工学会春季大会学術講演会講演論文集 
English: 
Volume, Number, Page         pp. 729-730
Published date Mar. 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese:2022年度精密工学会春季大会学術講演会 
English: 
Conference site
Japanese: 
English: 

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