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Title
Japanese:N極性GaN HEMTのTMAHによる素子分離 
English: 
Author
Japanese: 新井貴大, 青田智也, 眞壁勇夫, 中田健, 後藤高寛, 宮本恭幸.  
English: Takahiro Arai, Tomoya Aota, isao makabe, 中田健, Takahiro Gotow, YASUYUKI MIYAMOTO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese:第69回応用物理学会春季学術講演会 
English: 
Conference site
Japanese: 
English: 

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