Rapid Solid Phase Epitaxy of Wide-Bandgap oxide Semiconductor thin films by way of excimer laser processing

Publication Information

Title

Japanese:
English:	Rapid Solid Phase Epitaxy of Wide-Bandgap oxide Semiconductor thin films by way of excimer laser processing

Author

Japanese:	松田晃史.
English:	Akifumi Matsuda.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 16, 2022

Publisher

Japanese:
English:	International Union of Materials Research Societies

Conference name

Japanese:
English:	IUMRS-ICAM 2021

Conference site

Japanese:	カンクン
English:	Cancun

Official URL