大気圧プラズマCVDにおけるプラズマガス種の薄膜形成過程および膜特性に与える影響

Publication Information

Title

Japanese:	大気圧プラズマCVDにおけるプラズマガス種の薄膜形成過程および膜特性に与える影響
English:	Effect of Plasma Gas Species on Thin Film Formation Process and Film Properties in Atmospheric Pressure Plasma CVD

Author

Japanese:	山崎顕一, 安井祐之, 末松妃菜子, 野口剛, 末永祐磨, 沖野晃俊.
English:	Kenichi Yamazaki, Hiroyuki Yasui, Hinako Suematsu, Tsuyoshi Noguchi, Yuma Suenaga, AKITOSHI OKINO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2022

Publisher

Japanese:
English:

Conference name

Japanese:	第71回高分子討論会
English:

Conference site

Japanese:	北海道札幌市
English: