3D coating of ta-C films using FCVA method (The mechaincal properties of ta-C films deposited on the sidewall)

Publication Information

Title

Japanese:
English:	3D coating of ta-C films using FCVA method (The mechaincal properties of ta-C films deposited on the sidewall)

Author

Japanese:	Yuto Tameno, Takumi Ishikawa, 加藤豊大, 川合功太郎, 赤坂大樹, 平田祐樹, 大竹尚登, Hiroshige Matsuoka.
English:	Yuto Tameno, Takumi Ishikawa, Toyohiro Kato, Kotaro Kawai, Hiroki Akasaka, Yuki Hirata, Naoto Ohtake, Hiroshige Matsuoka.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment

Conference site

Japanese:
English: