Study on the surface properties of ta-C films deposited by FCVA method on the trench-shaped target

Publication Information

Title

Japanese:
English:	Study on the surface properties of ta-C films deposited by FCVA method on the trench-shaped target

Author

Japanese:	Hayata Fujimoto, Takumi Ishikawa, 川合功太郎, 加藤豊大, 赤坂大樹, 平田祐樹, 大竹尚登, Hiroshige Matsuoka.
English:	Hayata Fujimoto, Takumi Ishikawa, Kotaro Kawai, Toyohiro Kato, Hiroki Akasaka, Yuki Hirata, Naoto Ohtake, Hiroshige Matsuoka.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment

Conference site

Japanese:
English: