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Publication Information
Title
Japanese:
English:
Study on the surface properties of ta-C films deposited by FCVA method on the trench-shaped target
Author
Japanese:
Hayata Fujimoto, Takumi Ishikawa,
川合 功太郎
,
加藤 豊大
,
赤坂 大樹
,
平田 祐樹
,
大竹 尚登
, Hiroshige Matsuoka.
English:
Hayata Fujimoto, Takumi Ishikawa,
Kotaro Kawai
,
Toyohiro Kato
,
Hiroki Akasaka
,
Yuki Hirata
,
Naoto Ohtake
, Hiroshige Matsuoka.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Aug. 2022
Publisher
Japanese:
English:
Conference name
Japanese:
English:
2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.