Comparative study on the film properties of 3-dimensional ta-C films prepared by CVD and FCVA coating processes

Publication Information

Title

Japanese:
English:	Comparative study on the film properties of 3-dimensional ta-C films prepared by CVD and FCVA coating processes

Author

Japanese:	平田祐樹, 川合功太郎, 加藤豊大, Hayata Fujimoto, Yuto Tameno, Takumi Ishikawa, Hiroshige Matsuoka, 赤坂大樹, 大竹尚登.
English:	Yuki Hirata, Kotaro Kawai, Toyohiro Kato, Hayata Fujimoto, Yuto Tameno, Takumi Ishikawa, Hiroshige Matsuoka, Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	32nd International Conference on Diamond and Carbon Materials

Conference site

Japanese:
English:	Lisbon