The feasibility of spectroscopic measurement of electron temperature and density of atmospheric-pressure non-equilibrium argon plasma was investigated, applying optical emission spectroscopic measurement of a continuum spectrum due to electron-atom bremsstrahlung. Emission spectroscopy was performed with an absolutely calibrated measurement system using a discharge device that can limit the discharge space to one point. The obtained spectrum is fitted with a theoretical curve. Assuming the Druyvesteyn electron energy distribution function, appropriate electron temperature and density were derived. The validity was confirmed by the cross-check between the line spectral intensity and the excited state density calculated with the Ar collisional radiative model with atomic collisional processes.
Award
Award Commemorative Lecture for the 20th Plasma Electronics Award