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Title
Japanese:連続スペクトル計測による大気圧非平衡Arプラズマ電子温度密度診断 
English:Diagnostics of electron temperature and density of atmospheric-pressure nonequilibrium Ar plasma by continuum emission measurement 
Author
Japanese: 大西 広, 山崎 文徳, 箱崎 喜郎, 竹村 将沙樹, 根津 篤, 赤塚 洋.  
English: Hiroshi Onishi, Fuminori Yamazaki, Yoshiro Hakozaki, Masaki Takemura, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第83回応用物理学会秋季学術講演会 講演予稿集 
English:Extended Abstracts of the 83rd JSAP Autumn Meeting 2022 
Volume, Number, Page         p. 07-045
Published date Aug. 26, 2022 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physcs 
Conference name
Japanese:第83回応用物理学会秋季学術講演会 
English:The 83rd JSAP Autumn Meeting 2022 
Conference site
Japanese:仙台市 
English:Sendai 
Official URL https://confit.atlas.jp/guide/event/jsap2022a/subject/21a-B200-2/tables?cryptoId=
 
Abstract The feasibility of spectroscopic measurement of electron temperature and density of atmospheric-pressure non-equilibrium argon plasma was investigated, applying optical emission spectroscopic measurement of a continuum spectrum due to electron-atom bremsstrahlung. Emission spectroscopy was performed with an absolutely calibrated measurement system using a discharge device that can limit the discharge space to one point. The obtained spectrum is fitted with a theoretical curve. Assuming the Druyvesteyn electron energy distribution function, appropriate electron temperature and density were derived. The validity was confirmed by the cross-check between the line spectral intensity and the excited state density calculated with the Ar collisional radiative model with atomic collisional processes.
Award Award Commemorative Lecture for the 20th Plasma Electronics Award

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