Highly-dense and smooth amorphous silicon films fabricated by arc plasma deposition and electrochemical properties

Publication Information

Title

Japanese:
English:	Highly-dense and smooth amorphous silicon films fabricated by arc plasma deposition and electrochemical properties

Author

Japanese:	淺野翔, 畠純一, 松井直喜, 鈴木耕太, 菅野了次, 平山雅章.
English:	Sho Asano, Junichi Hata, Naoki Matsui, Kota Suzuki, Ryoji Kanno, Masaaki Hirayama.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 15, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	17th Asian Conference on Solid State Ionics (ACSSI-2020)(ハイブリッド開催)

Conference site

Japanese:
English:	Nagoya