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Title
Japanese:ポジ型電子線レジストSML1000をマスクとして用いたSF6-RIEによるGeのドライエッチング 
English: 
Author
Japanese: 松谷晃宏, 遠西美重, 藤本美穂, 松下祥子.  
English: Akihiro Matsutani, Mie Tohnishi, Miho Fujimoto, Sachiko Matsushita.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         20a-P01-5
Published date Sept. 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese:2022年第83回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese: 
English: 

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