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Publication Information
Title
Japanese:
ポジ型電子線レジストSML1000をマスクとして用いたSF6-RIEによるGeのドライエッチング
English:
Author
Japanese:
松谷晃宏
,
遠西美重
,
藤本美穂
,
松下祥子
.
English:
Akihiro Matsutani
,
Mie Tohnishi
,
Miho Fujimoto
,
Sachiko Matsushita
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
20a-P01-5
Published date
Sept. 2022
Publisher
Japanese:
English:
Conference name
Japanese:
2022年第83回応用物理学会秋季学術講演会
English:
Conference site
Japanese:
English:
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Tokyo Institute of Technology All rights reserved.