Data augmentation in extreme ultraviolet lithography simulation using convolutional neural network

Publication Information

Title

Japanese:
English:	Data augmentation in extreme ultraviolet lithography simulation using convolutional neural network

Author

Japanese:	田邊容由, 高橋篤司.
English:	Hiroyoshi Tanabe, Atsushi Takahashi.

Language

English

Journal/Book name

Japanese:
English:	Journal of Micro/Nanopatterning, Materials and Metrology (JM3)

Volume, Number, Page

Vol. 21 Issue 4 041602

Published date

Oct. 14, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI