反応性対向ターゲット式スパッタ法で作製したCoZrO薄膜における 酸素導入量が磁気特性に与える影響

Publication Information

Title

Japanese:	反応性対向ターゲット式スパッタ法で作製したCoZrO薄膜における酸素導入量が磁気特性に与える影響
English:	Effects of oxygen gas flow on magnetic property of CoZrO films formed by reactive facing target sputtering

Author

Japanese:	金子忠幸, 仁田帆南, 高村陽太, 中川茂樹.
English:	T. Kaneko, H. Nitta, Y. Takamura, S. Nakagawa.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

08pC-5

Published date

Sept. 8, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	第46回日本磁気学会学術講演会
English:	The 46th Annual Conference on MAGNETICS in Japan

Conference site

Japanese:	長野県長野市
English:	Nakagano

Official URL