導波路に向けた屈折率自由度を持つSiONの成膜条件の検討

Publication Information

Title

Japanese:	導波路に向けた屈折率自由度を持つSiONの成膜条件の検討
English:

Author

Japanese:	山口圭太, MOATAZShaher Anis Mahmoud Eissa, 大礒義孝, 雨宮智宏, 西山伸彦.
English:	Keita Yamaguchi, Shaher Anis Mahmoud Eissa Moataz, Yoshitaka Oiso, Tomohiro Amemiya, Nobuhiko Nishiyama.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 21, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	2022年第83回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	仙台
English: