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Publication Information
Title
Japanese:
導波路に向けた屈折率自由度を持つSiONの成膜条件の検討
English:
Author
Japanese:
山口 圭太
,
MOATAZShaher Anis Mahmoud Eissa
,
大礒義孝
,
雨宮智宏
,
西山伸彦
.
English:
Keita Yamaguchi
,
Shaher Anis Mahmoud Eissa Moataz
,
Yoshitaka Oiso
,
Tomohiro Amemiya
,
Nobuhiko Nishiyama
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 21, 2022
Publisher
Japanese:
English:
Conference name
Japanese:
2022年 第83回 応用物理学会秋季学術講演会
English:
Conference site
Japanese:
仙台
English:
©2007
Tokyo Institute of Technology All rights reserved.