Controller Design for Piezo-driven Segmented Fast Steering Mirror

Publication Information

Title

Japanese:
English:	Controller Design for Piezo-driven Segmented Fast Steering Mirror

Author

Japanese:	西田莉那, 鍾建朋, 進士忠彦.
English:	Rina Nishida, Jianpeng Zhong, TADAHIKO SHINSHI.

Language

English

Journal/Book name

Japanese:
English:	Proc. of the 9th Intl. Conf. of Asian Society for Precision Engg. and Nanotechnology (ASPEN 2022)

Volume, Number, Page

pp. 338-341

Published date

Nov. 15, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 9th International Conference of ASPEN（ASPEN 2022）

Conference site

Japanese:
English:	Singapore

DOI