Home >

news Help

Publication Information


Title
Japanese:Ti/Au 積層構造有するマイクロカンチレバーの長期構造安定性に対する幾何学構造の影響 
English: 
Author
Japanese: 宮井 良介, 栗岡 智行, Chun-Yi Chen, Tso-Fu Mark Chang, 大西 哲, Parthojit Chakraborty, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人.  
English: Ryosuke Miyai, Tomoyuki Kurioka, Chun Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit CHAKRABORTY, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.  
Language Japanese 
Journal/Book name
Japanese:第70回応用物理学会春季学術講演会 
English: 
Volume, Number, Page         p. 16a-B410-5
Published date Mar. 15, 2023 
Publisher
Japanese: 
English: 
Conference name
Japanese:第70回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京 
English: 

©2007 Tokyo Institute of Technology All rights reserved.