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Title
Japanese:大気圧非平衡プラズマの連続スペクトル発光分光計測のその後の展開--電子エネルギー分布関数の測定 
English:Optical emission spectroscopy of non-equilibrium atmospheric-pressure plasmas–measurement of electron energy distribution function 
Author
Japanese: 大西 広, 山崎 文徳, 箱崎 喜郎, 竹村 将沙樹, 根津 篤, 赤塚 洋.  
English: Hiroshi Onishi, Fuminori Yamazaki, Yoshiro Hakozaki, Masaki Takemura, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:2023年第70回応用物理学会春季学術講演会 講演予稿集 
English:Extended abstracts of the 70th JSAP Spring Meeting 2023 
Volume, Number, Page         07-001
Published date Feb. 27, 2023 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physcs 
Conference name
Japanese:2023年第70回応用物理学会春季学術講演会 
English:The 70th JSAP Spring Meeting 2023 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://confit.atlas.jp/guide/event/jsap2023s/subject/15p-B309-1/tables?cryptoId=
 
Abstract The electron energy distribution function (EEDF) of non-equilibrium atmospheric pressure plasmas can be obtained by OES measurement of the continuous spectrum due to e-a bremsstrahlung. If the obtained spectrum is applied to a theoretical formula, it becomes a Volterra integral equation of the first kind, and EEDF can be solved in principle. However, since the measurable wavelength range is finite, general solvers cannot be used. Therefore, the electron energy probabilistic function EEPF=EEDF/√E was determined so as to minimize the fitness parameter as the objective function. As a result, the EEPF was found to be a two-temperature Maxwellian distribution with a bend near 2.8 eV. The bulk component was about 0.26-0.29 eV, and the tail component was about 2.2-3.0 eV. It was found that this method does not provide information about electrons with lower energies than the photons being measured, while information about higher energies can be obtained with poor accuracy.
Award The 44th Paper Award Speech

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