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Title
Japanese:大気圧低温プラズマによるシリコン親水化処理に与える周辺ガスの影響 
English: 
Author
Japanese: 日原弘喜, 山内素明, 沖野晃俊, 西山伸彦.  
English: Koki Hihara, Motoaki Yamauchi, AKITOSHI OKINO, Nobuhiko Nishiyama.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Dec. 2, 2022 
Publisher
Japanese: 
English: 
Conference name
Japanese:令和4年(2022年)放電学会 年次大会 
English: 
Conference site
Japanese:東京都世田谷区玉堤1-28-1 
English: 

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