固体ソースH₂Oプラズマ処理したポリイミド樹脂の表面のXPS分析

Publication Information

Title

Japanese:	固体ソースH₂Oプラズマ処理したポリイミド樹脂の表面のXPS分析
English:	XPS Analysis of Polyimide Surface Treated with Solid Source H₂O Plasma

Author

Japanese:	遠西美重, 松谷晃宏, 生方俊, 松下祥子.
English:	Mie Tohnishi, Akihiro Matsutani, Takashi Ubukata, Sachiko Matsushita.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2023

Publisher

Japanese:
English:

Conference name

Japanese:	2023年第70回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京
English: