Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Comparison of PECVD and FCVA deposition technique

Publication Information

Title

Japanese:
English:	Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Comparison of PECVD and FCVA deposition technique

Author

Japanese:	平田祐樹, 川合功太郎, 加藤豊大, Hayata Fujimoto, Yuto Tameno, 西川拓海, Hiroshige Matsuoka, 赤坂大樹, 大竹尚登.
English:	Yuki Hirata, Kotaro Kawai, Toyohiro Kato, Hayata Fujimoto, Yuto Tameno, Takumi Ishikawa, Hiroshige Matsuoka, Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	Surface and Coatings Technology

Volume, Number, Page

pp. 129401

Published date

Mar. 10, 2023

Publisher

Japanese:
English:	Elsevier

Conference name

Japanese:
English:

Conference site

Japanese:
English: