Lateral thickness change of the high-k film on GaN HEMT for uniform electric field

Publication Information

Title

Japanese:
English:	Lateral thickness change of the high-k film on GaN HEMT for uniform electric field

Author

Japanese:	宮本恭幸, 牧山剛三.
English:	Y. Miyamoto, K. Makiyama.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 20, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	14th Topical Workshop on Heterostructure Microelectronics, (TWHM 2022)

Conference site

Japanese:	広島
English: