[17a-PA05-5] Optimization of 2-step deposition process of i-a-Si:H passivation layer deposited by facing target sputtering

Publication Information

Title

Japanese:
English:	[17a-PA05-5] Optimization of 2-step deposition process of i-a-Si:H passivation layer deposited by facing target sputtering

Author

Japanese:	LI SHASHA, 宮島晋介.
English:	ShaSha Li, Shinsuke Miyajima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 17, 2023

Publisher

Japanese:
English:

Conference name

Japanese:	第70回応用物理学会春季学術講演会
English:	The 70th JSAP Spring Meeting 2023

Conference site

Japanese:	東京
English:	Tokyo