Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology

Publication Information

Title

Japanese:
English:	Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology

Author

Japanese:	大西哲, 御宿希祐, TENNETI DEVI, 町田克之, CHAKRABORTY P, 曽根正人, 三宅美博, 伊藤浩之.
English:	Akira Onishi, Kisuke Miyado, Devi Srujana Tenneti, Katsuyuki Machida, Parthojit Chakraborty, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito.

Language

English

Journal/Book name

Japanese:
English:	2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Volume, Number, Page

Published date

Mar. 31, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Conference site

Japanese:
English:	Kauai, Hawaii

Official URL

DOI