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Publication Information
Title
Japanese:
English:
Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology
Author
Japanese:
大西 哲
,
御宿 希祐
,
TENNETI DEVI
,
町田 克之
,
CHAKRABORTY P
,
曽根 正人
,
三宅 美博
,
伊藤 浩之
.
English:
Akira Onishi
,
Kisuke Miyado
,
Devi Srujana Tenneti
,
Katsuyuki Machida
,
Parthojit Chakraborty
,
Masato Sone
,
Yoshihiro Miyake
,
Hiroyuki Ito
.
Language
English
Journal/Book name
Japanese:
English:
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Volume, Number, Page
Published date
Mar. 31, 2023
Publisher
Japanese:
English:
Conference name
Japanese:
English:
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Conference site
Japanese:
English:
Kauai, Hawaii
Official URL
https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10103943
DOI
https://doi.org/10.1109/INERTIAL56358.2023.10103943
©2007
Tokyo Institute of Technology All rights reserved.