Preparation of orthorhombic Y-doped TaON film | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Preparation of orthorhombic Y-doped TaON film

Author

Japanese:	三村和仙, 清水荘雄, 舟窪浩.
English:	Takanori Mimura, Takao Shimizu, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	J Ceram Soc. Jpn.

Volume, Number, Page

Vol. 130 No. 7 pp. 432-435

Published date

July 1, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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