Deposition and evaluation of Ta2O5 piezoelectric thin film on Pt crystal film

Publication Information

Title

Japanese:
English:	Deposition and evaluation of Ta2O5 piezoelectric thin film on Pt crystal film

Author

Japanese:	Keisuke Matsuura, Masashi Suzuki, Shoji Kakio, 小寺正徳, 舟窪浩.
English:	Keisuke Matsuura, Masashi Suzuki, Shoji Kakio, Masanori Kodera, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 61 pp. SG1076-1-8

Published date

June 10, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: