Simultaneous high frequency measurement of both direct and inverse transverse piezoelectric coefficients of thin films using longitudinal vibration

Publication Information

Title

Japanese:
English:	Simultaneous high frequency measurement of both direct and inverse transverse piezoelectric coefficients of thin films using longitudinal vibration

Author

Japanese:	舘山明紀, 折野裕一郎, 伊東良晴, 白石貴久, 清水荘雄, 黒澤実, 舟窪浩.
English:	Akinori Tateyama, Yuichiro Orino, Yoshiharu Ito, Takahisa Shiraishi, Takao Shimizu, Minoru Kurosawa, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Sensors and Actuators A: Physical

Volume, Number, Page

Vol. 354 114265

Published date

Feb. 25, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: