Fabrication and characterization CoZrO films deposited by facing targets reactive sputtering for micro magnetic inductor

Publication Information

Title

Japanese:
English:	Fabrication and characterization CoZrO films deposited by facing targets reactive sputtering for micro magnetic inductor

Author

Japanese:	金子忠幸, 仁田帆南, 高村陽太, 中川茂樹.
English:	T. Kaneko, H. Nitta, Y. Takamura, S. Nakagawa.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

CP-20

Published date

May 15, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The First International Symposium on Integrated Magnetics 2023 (iSIM 2023)

Conference site

Japanese:	宮城県仙台市
English:	Sendai, Miyagi

Official URL

Award

iSIM Best Poster Award May 2023