Simulation and fabrication of planar type spiral inductors with facing target sputtered CoFeB-SiO2 magnetic layers

Publication Information

Title

Japanese:
English:	Simulation and fabrication of planar type spiral inductors with facing target sputtered CoFeB-SiO2 magnetic layers

Author

Japanese:	高村陽太, 仁田帆南, R. Ishido, 金子忠幸, 宮崎曉, 細田万吉, 藤崎和幸, 中川茂樹.
English:	Y. Takamura, H. Nitta, R. Ishido, T. Kaneko, T. Miyazaki, N. Hosoda, K. Fujisaki, S. Nakagawa.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

CP-15

Published date

May 15, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The First International Symposium on Integrated Magnetics 2023 (iSIM 2023)

Conference site

Japanese:	宮城県仙台市
English:	Sendai, Miyagi

Official URL