Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors

Publication Information

Title

Japanese:
English:	Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors

Author

Japanese:	高村陽太, 仁田帆南, 河原和馬, 金子忠幸, 石戸亮祐, 宮﨑達也, 細田尚揮, 藤﨑敬介, 中川茂樹.
English:	Y. Takamura, H. Nitta, K. Kawahara, T. Kaneko, R. Ishido, T. Miyazaki, N. Hosoda, K. Fujisaki, S. Nakagawa.

Language

English

Journal/Book name

Japanese:
English:	Intermag 2023 Digest Book

Volume, Number, Page

MOA-05

Published date

May 15, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Intermag2023

Conference site

Japanese:	宮城県仙台市
English:	Sendai, Miyagi

Official URL