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Title
Japanese: 
English:Determination of the electron temperature and density of non-equilibrium atmospheric-pressure Ar plasma by OES using two-tempareture EEDF 
Author
Japanese: 榎本純, 菊地航行, 山下航平, 根津篤, 赤塚洋.  
English: Jun Enomoto, Wataru Kikuchi, Kouhei Yamashita, Atsushi Nezu, Hiroshi Akatsuka.  
Language English 
Journal/Book name
Japanese: 
English:Proceedings of 25th International Symposium on Plasma Chemistry (ISPC25) 
Volume, Number, Page        
Published date May 21, 2023 
Publisher
Japanese: 
English:International Organizing Committee of ISPC25 
Conference name
Japanese: 
English:25th International Symposium on Plasma Chemistry (ISPC25) 
Conference site
Japanese:京都 
English:Kyoto 
Official URL https://www.ispc25.com/index.html
 
Abstract A two-temperature electron energy distribution function (EEDF) is proposed for the non-equilibrium argon atmospheric-pressure plasma. Its continuum emission spectrum, dominated by electron-neutral bremsstrahlung radiation, is analyzed to determine the electron temperature (T_e) and density (N_e) by optical emission spectroscopic (OES) measurement. It was found that T_e ~ 0.4 eV and N_e ~ 3.3 x 10^{15} cm^{-3} with a discharge voltage of 5.4 kV. The two-temperature EEDF provided a better fit than the one-temperature EEDF.

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