Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers

Publication Information

Title

Japanese:
English:	Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers

Author

Japanese:	曽根正人, Chang Tso-Fu Mark, 栗岡智行, 陳君怡, CHAKRABORTY P, 町田克之, 伊藤浩之, 三宅美博.
English:	Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake.

Language

English

Journal/Book name

Japanese:
English:	244th ECS Meeting

Volume, Number, Page

Published date

Oct. 8, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	244th ECS Meeting

Conference site

Japanese:
English:	Gothenburg