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Title
Japanese:プラズマ産業革新技術, 第２章 材料分野への応用, 第１０節 高周波液中プラズマの生成とその材料応用 
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Author
Japanese: 竹内希.  
English: NOZOMI TAKEUCHI.  
Language Japanese 
Journal/Book name
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Volume, Number, Page        
Published date Apr. 2023 
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