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Publication Information
Title
Japanese:
English:
Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers
Author
Japanese:
渡邉春海
,
栗岡 智行
,
陳 君怡
,
Chang Tso-Fu Mark
,
大西 哲
,
CHAKRABORTY P
,
町田 克之
,
伊藤 浩之
,
三宅 美博
,
曽根 正人
.
English:
Syunkai Watanabe
,
Tomoyuki Kurioka
,
Chun-Yi Chen
,
Tso-Fu Mark Chang
,
Akira Onishi
,
Parthojit Chakraborty
,
Katsuyuki Machida
,
Hiroyuki Ito
,
Yoshihiro Miyake
,
Masato Sone
.
Language
English
Journal/Book name
Japanese:
English:
49th international conference on Micro and Nano Engineering (MNE2023)
Volume, Number, Page
Published date
Sept. 25, 2023
Publisher
Japanese:
English:
Conference name
Japanese:
English:
MNE2023
Conference site
Japanese:
English:
Berlin
©2007
Institute of Science Tokyo All rights reserved.