Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components

Publication Information

Title

Japanese:
English:	Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components

Author

Language

English

Journal/Book name

Japanese:
English:	49th international conference on Micro and Nano Engineering (MNE2023)

Volume, Number, Page

Published date

Sept. 23, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	49th international conference on Micro and Nano Engineering (MNE2023)

Conference site

Japanese:
English:	Berlin